M.V. Balakhanov

Al’manac of Modern Metrology № 1 (6) 2016, pages 138–151

The paper deals with the development of standards for clean rooms classified by the maximum permitted concentration of airborne particles. The situation with the introduction of new versions of international ISO standards approved in late 2015 and harmonisation of national standards with the new versions is described. The importance of performing calibration or verification of the instruments for the measurement of particle number density used in the certification and dust monitoring of clean rooms according to the national verification pattern is clarified.

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