M.V. Balakhanov

Al’manac of Modern Metrology № 2 (14) 2018, pages 122–149

The issues of ensuring the uniformity of measurements of both common and special parameters of clean rooms and process environments are considered. Use at delivery and acceptance of production of the measuring instruments traced to the State primary standards will be able to provide the proof of compliance to specified requirements of clean rooms, both products or productions, and the hi-tech production made in them. Provides information on the parameters, measured or controlled in the clean rooms, on the state verification schemes and including in it’s means of measurements of these quantities and on the State primary standards, heading the relevant verification scheme.

Key words: clean facilities, controlled environments, state primary standard, traceability.

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